A Quantum Chemical Exploration of SiC Chemical Vapor Deposition

Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method

The fabrication of SiC MEMS pressure sensor based on novel vacuum-sealed method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide is the sacrificial layer which solve stiction problem in proc...

SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors

Modeling of Plasma-Enhanced Chemical Vapor Deposition of Nano-crystalline Silicon Carbide Films Using Neural Network

s The infrared absorption peak shift of PECVD nano-crystalline β-SiC films have been modeled using neural network which was trained using the error back-propagation algorithm. This ANN model can be built with process input– output experimental data. The PECVD process was characterized by modeling peak shifts of Fourier transform infrared (FTIR) spectroscopy as a function of varying seven contro...

Carbon nanotube array thermal interfaces for high-temperature silicon carbide devices

Multiwalled carbon nanotube (MWCNT) arrays have been directly synthesized from templated Fe2O3 nanoparticles on the C-face of 4H-SiC substrates by microwave plasma chemical vapor deposition (MPCVD), and the room-temperature thermal resistances of SiC-MWCNT-Ag interfaces at 69–345 kPa as well as the thermal resistances of SiCMWCNT-Ag interfaces up to 250 C (at 69 kPa) have been measured using a ...

Synthesis and Characterization of Nanocrystalline Silicon Carbide Thin Films on Multimode Fiber Optic by means 150 MHz VHF-PECVD

In recent years, a number of advantages such as modification of nano-crystalline thin films, the ability for low-temperature deposition processes, the controlling of process, as well as high efficiency and repeatability of process, were offered using plasma deposition technique [1]. Silicon carbide (SiC) as a leading candidate for the replacement of Silicon (Si) for hightemperature and power el...